11. Check Beam Tilt Pivot Point X, Y

11. Check Beam Tilt Pivot Point X, Y
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Note:

The prerequisites for Pivot-Point is specimen being at eucentric height and objective being preceisly at focus level.

Make sure the specimen is at eucentric height.
Take out Obj. aperture.
Press button [ Align ] - [ Direct Alignment ] - [ Beam Tilt Pivot X ].
Merge image feature by adjusting [ Focus ] knob. This is to precisely focus the image.
Merge beam using [ Multi-fcuntion knobs ].
Repeat the last two steps for [ Beam Tilt Pivot Y ].
Press [ Align ] button again to exit.

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10. Adjust the specimen height to the eucentric height	Home	12. Check voltage and current rotation centers